Inline Magnetron Sputtering system
Inline magnetron sputtering coating muchina inonyanya DC (kana MF) magnetron sputtering coating inogona kuchinjirwa kune dzakasiyana siyana zvinangwa, senge: mhangura, titanium, chromium, simbi isina tsvina, nickel uye zvimwe zvinhu zvesimbi zvinogona kuvharidzirwa uchishandisa sputtering process. inogona kuvandudza kunamatira kwefirimu, kuberekazve, density, kufanana uye mamwe maitiro.
- a.Hunhu hwakakosha uye parameter
- b.horizontal line chimiro chinogona kuitika panguva imwe chete yakavharidzirwa kune rimwe divi
- c.Kubudirira kwekugadzira, iyo inokurumidza kumhanya inosvika 1 min / kurohwa
- d.modular dhizaini, kugadzirisa kuri nyore
- e.plating process maturity, goho repamusoro
- f.DC magnetron sputtering cathodes inogona kusiyana zvichienderana nezvinodiwa nemutengi
- g.vacuum system ine mechanical pombi, Roots pumps, diffusion pumps (molecular pump) Kuumbwa.
- h.Line body size inogona kusiyana zvichienderana nezvinodiwa nemutengi
- 1) Iyo vacuum kamuri yemuviri zvishandiswa zvakashandiswa SUS304, kukwenenzvera vacuum kamuri madziro kurapwa, yekunze madziro pfapfaidzo kupukuta mabhero kugadzirisa.
- 2) Kushandisa yakazvimirira gedhi vharafu pakati pevacuum kamuri - flapper vharafu parutivi, anogona zvinobudirira kucheka, kudzikamisa maitiro gasi.Parizvino kambani yedu inotora dhizaini yevhavhavhavhavha, inosimbisa zvirinani, yakasimba kudarika yazvino yepamba inojairwa vharafu.
- 3) Kutumira kunoshandisa magineti gwara, chengetedza kugadzikana kwedhiraivha.Kune yega yega kumhanya kweyese mutsara wekugadzira uchishandisa VVVF mota drive, kumhanya kumhanya kunogona kugadziridzwa.
- 4) Magetsi Kudzora Sisitimu: Bata Screen uye PLC otomatiki kutonga, murume-muchina nhaurirano kuti uwane iyo data yekuratidzira system, inoshanda paramita uye kutonga tekinoroji.
- 1) Pakupedzisira vacuum pressure: 6 × 1 0E-4 Pa
- 2) avhareji yekugadzira kutenderera: zvinoenderana nechigadzirwa chakatemwa
- 3) Iyo substrate inobata Size: inogona kugadzirwa zvinoenderana nezvinodiwa zve
- 4) Kufanana kwemafirimu: ± 3% yepamusoro nharembozha tekinoroji yakawedzera zvakanyanya chinangwa chekushandiswa
- Segmented heater dhizaini inobatsira kugadzirisa optimization.
Nyora meseji yako pano ugotitumira
